JPH0540905Y2 - - Google Patents

Info

Publication number
JPH0540905Y2
JPH0540905Y2 JP2253987U JP2253987U JPH0540905Y2 JP H0540905 Y2 JPH0540905 Y2 JP H0540905Y2 JP 2253987 U JP2253987 U JP 2253987U JP 2253987 U JP2253987 U JP 2253987U JP H0540905 Y2 JPH0540905 Y2 JP H0540905Y2
Authority
JP
Japan
Prior art keywords
moving
guide
bearing
slider
moving body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2253987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63131335U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2253987U priority Critical patent/JPH0540905Y2/ja
Publication of JPS63131335U publication Critical patent/JPS63131335U/ja
Application granted granted Critical
Publication of JPH0540905Y2 publication Critical patent/JPH0540905Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
JP2253987U 1987-02-18 1987-02-18 Expired - Lifetime JPH0540905Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (en]) 1987-02-18 1987-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (en]) 1987-02-18 1987-02-18

Publications (2)

Publication Number Publication Date
JPS63131335U JPS63131335U (en]) 1988-08-26
JPH0540905Y2 true JPH0540905Y2 (en]) 1993-10-18

Family

ID=30820020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2253987U Expired - Lifetime JPH0540905Y2 (en]) 1987-02-18 1987-02-18

Country Status (1)

Country Link
JP (1) JPH0540905Y2 (en])

Also Published As

Publication number Publication date
JPS63131335U (en]) 1988-08-26

Similar Documents

Publication Publication Date Title
US5760564A (en) Dual guide beam stage mechanism with yaw control
JPH0719693Y2 (ja) 移動テーブル
JPH07119814B2 (ja) 微小運動用調節装置
JP2798829B2 (ja) ２次元運動機構
JP2557316Y2 (ja) 移動テーブル
JPH0760191B2 (ja) 精密位置決め装置
JP2523177B2 (ja) 位置決めテ―ブル
JPH0540905Y2 (en])
KR20090034577A (ko) 미세 이송 기구 및 이를 이용한 초정밀 스테이지
JPH02223844A (ja) 物体ホルダ
JPH11292479A (ja) 板材ローダ
JPH0238740U (en])
JP2001328043A (ja) テーブル位置決め装置
JPH09155666A (ja) ステージの縦横移動旋回支持機構
DE19717142B4 (de) Robotersystem zur Manipulation und/oder räumlichen Handhabung von Objekten
JPH0646246B2 (ja) 微動移動機構
KR200492381Y1 (ko) 다각도로 작동 가능한 선형 모듈
JP2001264640A (ja) 顕微鏡ステージ
JP7180895B2 (ja) 位置決めテーブル
JPS59137616A (ja) 移動テ−ブル
JPH081514Y2 (ja) 回転テーブル付き一軸テーブル
JPH062073Y2 (ja) ラック・ピニオン伝動装置
JPH0430931A (ja) 移動テーブル
JPS62219010A (ja) 微動機構
JP2518531Y2 (ja) 顕微鏡の案内機構